Generation of SAW in BST ferroelectric film under uniaxial strain

V.B. Shirokov, P.E. Timoshenko, V.V. Kalinchuk

Author details

V.B. Shirokov
Southern Scientific Center of RAS, Rostov-on-Don, Russian Federation; Southern Federal University, Rostov-on-Don, Russian Federation
P.E. Timoshenko
Southern Federal University, Rostov-on-Don, Russian Federation
V.V. Kalinchuk
Southern Scientific Center of RAS, Rostov-on-Don, Russian Federation

https://doi.org/10.15593/perm.mech/2023.1.16

The electro-mechanical properties of a ferroelectric film of barium strontium titanate (BST) film located on a silicon substrate depend on applied external strain. A significant dependence is observed for concentrations close to values, where a phase transition for the ferroelectric film occurs. A model of single-crystal BST film near the phase transition under uniaxial strain is studied by the thermodynamic theory of phase transitions. The material properties of the film obtained by the model are used for numerical study of the excitation of Rayleigh acoustic waves on the surface of the film-substrate heterostructure. Shifting the extrema of S-parameters, characterizing the efficiency of excitation of surface acoustic waves, is shown under the applied strain. The change of S-parameters for the first three resonances determined principally by the geometry of the interdigital electrodes is presented. The largest shift of resonant frequency is observed in a case of the second resonance that corresponds to Sezava wave.

Keywords

FerroelectricsBarium Strontium TitanatePhenomenological TheoryFinite-Element MethodSurface Acoustic Waves

ГЕНЕРАЦИЯ ПОВЕРХНОСТНЫХ АКУСТИЧЕСКИХ ВОЛН СЕГНЕТОЭЛЕКТРИЧЕСКОЙ ПЛЕНКОЙ BST ПРИ ДЕЙСТВИИ ОДНООСНОЙ НАГРУЗКИ

Электромеханические свойства сегнетоэлектрической пленки титаната бария стронция (BST) на подложке кремния зависят от приложенной деформации. Особенно сильная зависимость наблюдается для концентраций, близких к значениям, при которых происходит смена фазовых состояний сегнетоэлектрической пленки. В рамках термодинамической теории фазовых переходов исследована модель монокристаллической пленки BST вблизи такой области под действием одноосной растягивающей нагрузки. Полученные в модели материальные постоянные пленки использованы для численных расчетов возбуждения рэлеевских акустических волн на поверхности гетероструктуры пленка-подложка. Показано, что при изменении деформации происходит смещение экстремумов S-параметров, характеризующих эффективность возбуждения поверхностных волн. Приведено изменение S-параметров для первых трех резонансов, определяемых геометрией встречно-штыревых электродов. Наибольшее смещение резонансных частот наблюдается для второго резонанса – волны Сезава.

Ключевые слова

сегнетоэлектрикититанат бария станцияфеменологическая теорияметод конечных элементовповерхностные акустические волны

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Article information

Published: 29 May 2023
Issue date: 29 May 2023
Issue: No. 1 (2023)